GB/T 24469-2009
Gas for electronic industry.5N hydrogen chloride (English Version)

Standard No.
GB/T 24469-2009
Language
Chinese, Available in English version
Release Date
2009
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Status
 2015-07
Replace By
GB/T 14602-2014
Latest
GB/T 14602-2014
Scope
This standard specifies the technical requirements, inspection methods, inspection rules and packaging, marking, transportation, storage, filling, sub-packaging and safety requirements for the gas 5N hydrogen chloride used in the electronics industry. This standard applies to bottled liquefied hydrogen chloride produced from industrial hydrogen chloride as raw material through purification. Hydrogen chloride is mainly used in the vapor phase polishing, epitaxy and base corrosion processes of single crystal silicon wafers in the production of semiconductor devices in the microelectronics industry. It can also be used in cemented carbide and glass surface treatment, pharmaceutical intermediates and fine chemical manufacturing, scientific research and other fields. Molecular formula: HCl Relative molecular mass: 36.46l (according to the international relative atomic mass in 2005)

GB/T 24469-2009 Referenced Document

  • GB 13004 Periodic inspection and evaluation of seamless steel gas cylinders
  • GB 14193 Rules for filling of liquefied gas cylinders
  • GB 15258 General rules for preparation of precautionary label for chemicals
  • GB 15382 General specifications of gas cylinder valves
  • GB 17265 Safety specification for filling station of liquefied gas cylinders
  • GB 190 Packing symbol of dangerous goods
  • GB 5099 Seamless steel gas cylinders
  • GB 7144 Coloured cylinder mark for gases
  • GB/T 16942 Gas for electronic industry.Hydrogen*2009-10-30 Update
  • GB/T 16943 Gas for electronic industry.Helium*2009-10-30 Update
  • GB/T 16944 Gas for electronic industry.Nitrogen*2009-10-30 Update
  • GB/T 5832.2 Gas analysis—Determination of water—Part 2: Dew point method*2016-12-13 Update
  • GB/T 6681 General rules for sampling gaseous chemical products

GB/T 24469-2009 history

GB/T 24469-2009 Gas for electronic industry.5N hydrogen chloride was changed to GB/T 14602-2014 Gases for electronic industry.Hydrogen chloride.

Gas for electronic industry.5N hydrogen chloride



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