This standard specifies the technical requirements, inspection methods, inspection rules and packaging, marking, transportation, storage, filling, sub-packaging and safety requirements for the gas 5N hydrogen chloride used in the electronics industry. This standard applies to bottled liquefied hydrogen chloride produced from industrial hydrogen chloride as raw material through purification. Hydrogen chloride is mainly used in the vapor phase polishing, epitaxy and base corrosion processes of single crystal silicon wafers in the production of semiconductor devices in the microelectronics industry. It can also be used in cemented carbide and glass surface treatment, pharmaceutical intermediates and fine chemical manufacturing, scientific research and other fields. Molecular formula: HCl Relative molecular mass: 36.46l (according to the international relative atomic mass in 2005)
GB/T 24469-2009 Referenced Document
GB 13004 Periodic inspection and evaluation of seamless steel gas cylinders
GB 14193 Rules for filling of liquefied gas cylinders
GB 15258 General rules for preparation of precautionary label for chemicals
GB 15382 General specifications of gas cylinder valves
GB 17265 Safety specification for filling station of liquefied gas cylinders