ISO 18118:2004 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
This International Standard gives guidance on the measurement and use of experimentally determined
relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron
spectroscopy and X-ray photoelectron spectroscopy.
ISO 18118:2004 Referenced Document
ISO 18115 Surface chemical analysis - Vocabulary; Amndment 2*, 2007-12-01 Update
ISO 21270 Surface chemical analysis - X-ray photoelectron and Auger electron spectrometers - Linearity of intensity scale*, 2004-06-01 Update
ISO 18118:2004 history
2024ISO 18118:2024 Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis
2015ISO 18118:2015 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
2004ISO 18118:2004 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials