GB/T 16594-2008
General rules for measurement of length in micron scale by SEM (English Version)
- Standard No.
- GB/T 16594-2008
- Language
- Chinese, Available in English version
- Release Date
- 2008
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 16594-2008
- Replace
- GB/T 16594-1996
- Scope
- This standard specifies the applicable principles for the measurement of micron-scale lengths by scanning electron microscopy. Suitable for measuring (0.5~10) μm length.
GB/T 16594-2008 Referenced Document
- JJF 1001-1998 General Terms in Metrology and Their Definitions
- JJF 1059-1999 Evaluation and Expression of Uncertainty in Measurement
- JJG 550-1988 Verification Regulation of Scanning Electron Microscope
GB/T 16594-2008 history
- 2008 GB/T 16594-2008 General rules for measurement of length in micron scale by SEM
- 1996 GB/T 16594-1996 Micron grade lenght measurement by SEM
