GB/T 16594-1996
Micron grade lenght measurement by SEM (English Version)
- Standard No.
- GB/T 16594-1996
- Language
- Chinese, Available in English version
- Release Date
- 1996
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Status
- 2009-05
- Replace By
- GB/T 16594-2008
- Latest
- GB/T 16594-2008
- Scope
- This standard specifies the method for measuring micron-level lengths with scanning electron microscopy, which is suitable for measuring the length of 0.5-10 μm, and is also suitable for the measurement of micron-level lengths by electronic probe analyzers.
GB/T 16594-1996 history
- 2008 GB/T 16594-2008 General rules for measurement of length in micron scale by SEM
- 1996 GB/T 16594-1996 Micron grade lenght measurement by SEM
