JIS R 1683:2007
Test method for surface roughness of ceramic thin films by atomic force microscopy

Standard No.

JIS R 1683:2007

Release Date

2007

Published By

Japanese Industrial Standards Committee (JISC)

Status

Withdraw

Replace By

JIS R 1683:2014

Latest

JIS R 1683:2014

Scope

This standard specifies that, among the surface shapes of fine ceramic thin films formed on substrates, the arithmetic mean roughness Ra ranges from 1 to 30 nm, and the average length RSm of the roughness curve elements ranges from 0.04 to 2.5 nm. Specifies the method for measuring surface roughness in μm using an atomic force microscope.

JIS R 1683:2007 Referenced Document

• JIS B 0601 Geometrical Product Specifications (GPS).Surface texture: Profile method.Terms, definitions and surface texture parameters*， 2013-03-21 Update
• JIS B 0633 Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Rules and procedures for the assessment of surface texture
• JIS B 0651 Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Nominal characteristics of contact (stylus) instruments
• JIS Z 8401 Rounding of numbers*， 2019-01-01 Update

JIS R 1683:2007 history

• 2014 JIS R 1683:2014 Test method for surface roughness of ceramic thin films by atomic force microscopy
• 2007 JIS R 1683:2007 Test method for surface roughness of ceramic thin films by atomic force microscopy