ISO 22489:2006 Microbeam analysis - Electron probe microanalysis - Quantitative point analysis for bulk specimens using wavelength-dispersive X-ray spectroscopy
This International Standard specifies requirements for the quantification of elements in a micrometre-sized
volume of a specimen identified through analysis of the X-rays generated by an electron beam using a
wavelength-dispersive spectrometer (WDS) fitted either to an electron probe microanalyser or to a scanning
electron microscope (SEM).
It describes:
— the principle of the quantitative analysis;
— the general coverage of this technique in terms of elements, mass fractions and reference specimens;
— the general requirements for the instrument;
— the fundamental procedures involved, such as specimen preparation, selection of experimental conditions,
the measurements, the analysis of these and the report.
This International Standard is intended for the quantitative analysis of a flat and homogeneous bulk specimen
using a normal incidence beam. It does not specify detailed requirements for either the instruments or the data
reduction software. Operators should obtain information such as installation conditions, detailed procedures for
operation and specification of the instrument from the makers of any products used.
ISO 22489:2006 history
2016ISO 22489:2016 Microbeam analysis - Electron probe microanalysis - Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy
2006ISO 22489:2006 Microbeam analysis - Electron probe microanalysis - Quantitative point analysis for bulk specimens using wavelength-dispersive X-ray spectroscopy