GB/T 6618-1995
Test method for thickness and total thickness variation of silicon slices (English Version)

Standard No.

GB/T 6618-1995

Language

Chinese, Available in English version

Release Date

1995

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Status

Be replaced 2010-06

Replace By

GB/T 6618-2009

Latest

GB/T 6618-2009

Scope

This standard specifies the discrete point and scanning measurement methods for the thickness and total thickness variation of silicon single crystal cut, ground and polished wafers (silicon wafers for short).

GB/T 6618-1995 history

• 2009 GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices
• 1995 GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices