ISO 13067:2020 PDF

Scope: This document describes procedures for measuring average grain size derived from a two-dimensional polished cross-section using electron backscatter diffraction (EBSD). This requires the measurement of orientation, misorientation and pattern quality factor as a function of position in the crystalline specimen[1]. The measurements in this document are made on two dimensional sections. The reader should note carefully the definitions used (3.3) which draw a distinction between the measured sectional grain sizes, and the mean grain size which can be derived from them that relates to the three dimensional grain size. NOTE 1 While conventional methods for grain size determination using optical microscopy are well- established, EBSD methods offer a number of advantages over these techniques, including increased spatial resolution and quantitative description of the orientation of the grains. NOTE 2 The method also lends itself to the measurement of the grain size of complex materials, for example those with a significant duplex content. NOTE 3 The reader is warned to interpret the results with care when attempting to investigate specimens with high levels of deformation.

ISO 13067:2020 Referenced Document

ISO 16700 Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
ISO 23833 Microbeam analysis - Electron probe microanalysis (EPMA) - Vocabulary
ISO 24173 Microbeam analysis*， 2024-01-01 Update
ISO/IEC 17025 General requirements for the competence of testing and calibration laboratories [Standard in French]

2020 ISO 13067:2020 Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size
2011 ISO 13067:2011 Microbeam analysis - Electron backscatter diffraction - Measurement of average grain size

$Microbeam analysis — Electron backscatter diffraction — Measurement of average grain size$