GB/T 42274-2022
Determination of the content and distribution of trace elements (magnesium, gallium) in aluminum nitride materials—Secondary ion mass spectrometry (English Version)
- Standard No.
- GB/T 42274-2022
- Language
- Chinese, Available in English version
- Release Date
- 2022
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 42274-2022
- Scope
- This document describes a secondary ion mass spectrometry method for the determination of the content and distribution of trace magnesium and gallium in aluminum nitride single crystals. This document is applicable to the quantitative determination of the content and distribution of trace magnesium and gallium in aluminum nitride single crystal. %. Note: The content of the element to be measured in the aluminum nitride single crystal is calculated by the number of atoms per cubic centimeter.
GB/T 42274-2022 Referenced Document
- GB/T 14264 Semiconductor materials-Terms and definitions
- GB/T 22461 Surface chemical analysis.Vocabulary
- GB/T 25186 Surface chemical analysis.Secondary-ion mass spectrometry.Determination of relative sensitivity factors from ion-implanted reference materials
- GB/T 32267 Terminology of performance testing for analytical instrument
GB/T 42274-2022 history
- 2022 GB/T 42274-2022 Determination of the content and distribution of trace elements (magnesium, gallium) in aluminum nitride materials—Secondary ion mass spectrometry
