GB/T 24582-2023 Determination of metal impurity content on polysilicon surface by acid leaching-inductively coupled plasma mass spectrometry (English Version)
2023GB/T 24582-2023 Determination of metal impurity content on polysilicon surface by acid leaching-inductively coupled plasma mass spectrometry
2009GB/T 24582-2009 Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-inductively coupled plasma mass spectrometry