KS C 6520-2021
Components and materials of semiconductor process —Measurement of wear characteristics by plasma

Standard No.

KS C 6520-2021

Release Date

2021

Published By

Korean Agency for Technology and Standards (KATS)

Latest

KS C 6520-2021

KS C 6520-2021 history

• 2021 KS C 6520-2021 Components and materials of semiconductor process —Measurement of wear characteristics by plasma
• 2019 KS C 6520-2019 Components and materials of semiconductor process —Measurement of wear characteristics by plasma
• 2008 KS C 6520-2008 Components and materials of semiconductor process－Measurement of wear characteristics by plasma