ISO 24639:2022 Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
International Organization for Standardization (ISO)
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ISO 24639:2022
Scope
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
ISO 24639:2022 Referenced Document
ISO 15932 Microbeam analysis.Analytical electron microscopy.Vocabulary
ISO 24639:2022 history
2022ISO 24639:2022 Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy