This document specifies the grades and classifications, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, accompanying documents and order form content of 6 to 8-inch 4H silicon carbide single crystal polished wafers. This document is applicable to the production of silicon carbide single crystal polished wafers for epitaxial materials for power electronic devices and radio frequency microwave devices.
T/IAWBS 005-2024 history
2024T/IAWBS 005-2024 6~8 inch polished monocrystalline silicon carbide wafers
2018T/IAWBS 005-2018 6 inch polished monocrystalline silicon carbide wafers