PNS ISO 14644-14:2021
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

Standard No.

PNS ISO 14644-14:2021

Release Date

2021

Published By

PH-BPS

Latest

PNS ISO 14644-14:2021

Scope

This part of PNS ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as

PNS ISO 14644-14:2021 history

• 2021 PNS ISO 14644-14:2021 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration