PNS ISO 14644-12:2021
Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Standard No.

PNS ISO 14644-12:2021

Release Date

2021

Published By

PH-BPS

Latest

PNS ISO 14644-12:2021

PNS ISO 14644-12:2021 history

• 2021 PNS ISO 14644-12:2021 Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration