NF A91-156*NF ISO 23216:2021
Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

Standard No.

NF A91-156*NF ISO 23216:2021

Release Date

2021

Published By

Association Francaise de Normalisation

Latest

NF A91-156*NF ISO 23216:2021

NF A91-156*NF ISO 23216:2021 history

• 2021 NF A91-156*NF ISO 23216:2021 Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry