DIN ISO 18516:2020
Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English

Standard No.

DIN ISO 18516:2020

Release Date

2020

Published By

German Institute for Standardization

Status

Be replaced

Replace By

DIN ISO 18516:2020-11

Latest

DIN ISO 18516:2020-11

Scope

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis.

DIN ISO 18516:2020 history

• 2020 DIN ISO 18516:2020-11 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English
• 2020 DIN ISO 18516:2020 Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English