ISO 21501-4:2018 PDF

Scope: This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 μm and 10 μm in particle size. Instruments that conform to this document are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644-1 and ISO 14644-2, as well as the measurement of number and size distribution of particles in various environments. The following parameters are within the scope of this document: — size setting error; — counting efficiency; — size resolution; — false count; — maximum particle number concentration; — sampling flow rate error; — sampling time error; — response rate; — calibration interval; — reporting results from test and calibration.

ISO 21501-4:2018 Referenced Document

ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
ISO 15900:2009 Determination of particle size distribution - Differential electrical mobility analysis for aerosol particles
ISO 27891:2015 Aerosol particle number concentration - Calibration of condensation particle counters
ISO 9276-1:1998 Representation of results of particle size analysis - Part 1: Graphical representation
ISO/IEC 17025:2017 General requirements for the competence of testing and calibration laboratories
ISO/IEC GUIDE 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
ISO/IEC GUIDE 99:2007 International vocabulary of metrology - Basic and general concepts and associated terms (VIM)
JIS B 9921:2010 Light scattering airborne particle counter for clean spaces

2023 ISO 21501-4:2018/Amd 1:2023 Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces — Amendment 1
2018 ISO 21501-4:2018 Determination of particle size distribution - Single particle light interaction methods - Part 4: Light scattering airborne particle counter for clean spaces
2007 ISO 21501-4:2007 Determination of particle size distribution - Single particle light interaction methods - Part 4: Light scattering airborne particle counter for clean spaces