ISO/TS 20175:2018
Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

Standard No.

ISO/TS 20175:2018

Release Date

2018

Published By

International Organization for Standardization (ISO)

Latest

ISO/TS 20175:2018

ISO/TS 20175:2018 Referenced Document

• DIN 28410:1968 Vacuum Technology; Mass Spectrometer Partial Pressure Gauges; Definitions, Characteristics, Operating Conditions
• ISO 14291:2012 Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers
• ISO 3567:2011 Vacuum gauges - Calibration by direct comparison with a reference gauge
• ISO/IEC GUIDE 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

ISO/TS 20175:2018 history

• 2018 ISO/TS 20175:2018 Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement