VDI 2083 Blatt 10-1998
Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
- Standard No.
- VDI 2083 Blatt 10-1998
- Release Date
- 1998
- Published By
- Association of German Mechanical Engineers
- Status
- Replace By
- VDI 2083 Blatt 7-2015
- Latest
- VDI 2083 Blatt 7-2015
- Replace
- VDI 2083 Blatt 10-1995
- Scope
- High-Purity/Ultra-High-Purity (HP-/UHP-) media (chemicals and gases) are being used more and more for many production purposes. The aim is to maintain the level of cleanliness between the point of supply (P.O.S.) and the point of entry (P.O.E.) or, respectively, to accept a reduction in purity only in certain defined areas where it is permissible. The purpose of this Guideline is to summarize knowledge regarding the design, construction, operation and monitoring of HP-/UHP-media supply systems. Cleanliness refers to residual contaminants such as particles, cations, anions, TOC and other specific parameters (foreign gases, humidity etc.). There is no information provided concerning cleanliness requirement conditions as these shall be determined by the respective user according to the intended utilization.
VDI 2083 Blatt 10-1998 Referenced Document
- DIN 2403:1984 Identification of pipelines according to the fluid conveyed
- DIN 4768:1990
- DIN EN 10204:1995 Metallic products – Types of test certificates
- DIN EN ISO 9001:1994 Quality management systems - Requirements
- DIN EN ISO 9002:1994 Quality systems — Model for quality assurance in production, installation and servicing
- DIN EN ISO 9003:1994 Quality systems – Model for quality assurance in final inspection and test
- DIN EN ISO 9004-1:1994 Quality management and quality system elements — Part 1: Guidelines
VDI 2083 Blatt 10-1998 history
- 2015 VDI 2083 Blatt 7-2015 Cleanroom technology - Ultrapure media - Quality, supply, distribution
- 1998 VDI 2083 Blatt 10-1998 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
- 1995 VDI 2083 Blatt 10-1995 Cleanroom technology - Pure media supply systems
VDI 2083 Blatt 10-1998 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems was changed to VDI 2083 Blatt 7-2015 Cleanroom technology - Ultrapure media - Quality, supply, distribution.
