ISO 14644-15:2017 PDF

Scope: This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8). The following are outside the scope of this document: — health and safety requirements; — compatibility with cleaning agents and techniques; — cleanability; — biocontamination; — specific requirements of equipment and materials for processes and products; — design details of equipment.

ISO 14644-15:2017 Referenced Document

ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 16000-6:2011 Indoor air - Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
ISO 16000-9:2006 Indoor air - Part 9: Determination of the emission of volatile organic compounds from building products and furnishing - Emission test chamber method
ISO 2889:2010 Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
ISO 8573-8:2004 Compressed air - Part 8: Test methods for solid particle content by mass concentration
JIS B 9926:1991 Clean room -- Test methods for dust generation from moving mechanisms
VDI 2083 Blatt 9.1-2006 Clean room technology - Compatibility with required cleanliness and surface cleanliness

2017 ISO 14644-15:2017 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration