EN ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
This part of ISO 14644 specifies a methodology for assessing the cleanroom suitability of equipment (e.g. machines, measuring instruments, process equipment, components and tools) for use in cleanrooms and associated controlled areas in terms of airborne particle cleanliness as specified in ISO 14644 -1 fixed. The particle size range is from 0.1 µm to equal to or greater than 5 µm (specified in ISO 14644-1). NOTE If the competent authorities provide additional guidelines or restrictions, appropriate adjustments to the assessment methodology may be necessary. The following aspects are not covered by this part of ISO 14644: Assessment of suitability for biocontamination; Testing the suitability of decontamination agents and techniques; cleanability of equipment and materials; Requirements for the structural design of devices and the selection of materials; physical material properties (e.g. electrostatic, thermal properties); Optimize equipment performance for specific process applications; Selection and application of statistical methods for testing; Regional security protocols and requirements.
EN ISO 14644-14:2016 Referenced Document
ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods
ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
ISO 8573-8:2004 Compressed air - Part 8: Test methods for solid particle content by mass concentration
JIS B 9926:1991 Clean room -- Test methods for dust generation from moving mechanisms
VDI 2083 Blatt 9.1-2006 Clean room technology - Compatibility with required cleanliness and surface cleanliness
EN ISO 14644-14:2016 history
2016EN ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration