EN ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
This part of ISO 14644 specifies the minimum requirements for a monitoring plan for the performance of a clean room or clean area in terms of air cleanliness by particle concentration based on parameters that measure or influence the concentration of airborne particles. This part of ISO 14644 does not cover condition monitoring of aspects such as: B. Vibration or general maintenance of the engineering systems. It is not intended for monitoring groups of particles that are outside the specified lower threshold (detection limit) of particle size in the range between 0.1 µm and 5 µm. Concentrations of ultrafine particles (particles smaller than 0.1 µm) are covered in another part of this series of standards.
EN ISO 14644-2:2015 Referenced Document
ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods
ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up
ISO 21501-4:2007 Determination of particle size distribution - Single particle light interaction methods - Part 4: Light scattering airborne particle counter for clean spaces
ISO 31000:2009 Risk management - Principles and guidelines
EN ISO 14644-2:2015 history
2015EN ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
2000EN ISO 14644-2:2000 Cleanrooms and Associated Controlled Environments - Part 2: Specifications for Testing and Monitoring to Prove Continued Compliance with ISO 14644-1 ISO 14644-2:2000