SJ/T 11489-2015
Test method for measuring etch pit density(EPD) in low dislocation density indium phosphide wafers (English Version)

Standard No.

SJ/T 11489-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Electron

Latest

SJ/T 11489-2015

Scope

This standard specifies the measurement method for corrosion pit density (EPD) of low dislocation density indium phosphide (InP) polished sheets. This standard is applicable to the measurement of EPD of circular InP wafers with a diameter of 2 inches and an EPD of less than 5 000/cm.

SJ/T 11489-2015 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions

SJ/T 11489-2015 history

• 2015 SJ/T 11489-2015 Test method for measuring etch pit density(EPD) in low dislocation density indium phosphide wafers