GOST 8.593-2009
State system for ensuring the uniformity of measurements. Atomic-force scanning probe microscopes. Method for verification

Standard No.

GOST 8.593-2009

Release Date

2009

Published By

RU-GOST R

Latest

GOST 8.593-2009

GOST 8.593-2009 Referenced Document

• GOST 12.2.061-1981 Occupational safety standards system. Industrial equipment. General safety requirements to working places
• GOST 8.591-2009 State system for ensuring the uniformity of measurements. Nanometer range relief measure with trapezoidal profile of elements. Verification method
• GOST 8.592-2009 State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Geometrical shapes, linear size and manufacturing material requirements
• GOST ISO 14644-1-2002 Cleanrooms and associated controlled environments. Part 1. Classification of air cleanliness

GOST 8.593-2009 history

• 2009 GOST 8.593-2009 State system for ensuring the uniformity of measurements. Atomic-force scanning probe microscopes. Method for verification