GOST R 8.629-2007 State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for verification
GOST 12.1.040-1983 Occupational safety standards system. Laser safety. General
GOST 12.2.061-1981 Occupational safety standards system. Industrial equipment. General safety requirements to working places
GOST ISO 14644-1-2002 Cleanrooms and associated controlled environments. Part 1. Classification of air cleanliness
GOST R 8.628-2007 State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Requirements for geometrical shapes, linear sizes and manufacturing material selection
GOST R ISO 14644-2-2001 Cleanrooms and associated controlled environments. Part 2. Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
GOST R ISO 14644-5-2005 Cleanrooms and associated controlled environments. Part 5. Operations
GOST R 8.629-2007 history
2007GOST R 8.629-2007 State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for verification