GB/T 32278-2015
Test method for flatness of silicon carbide single wafer (English Version)

Standard No.

GB/T 32278-2015

Language

Chinese, Available in English version

Release Date

2017

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 32278-2015

GB/T 32278-2015 Referenced Document

• GB 50073 Code for design of clean room
• GB/T 14264 Semiconductor materials-Terms and definitions

GB/T 32278-2015 history

• 2017 GB/T 32278-2015 Test method for flatness of silicon carbide single wafer