BS ISO 13083:2015
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Standard No.

BS ISO 13083:2015

Release Date

2015

Published By

British Standards Institution (BSI)

Latest

BS ISO 13083:2015

BS ISO 13083:2015 Referenced Document

• ISO 18115-2 Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy*， 2021-12-21 Update
• ISO 18516 Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres*， 2019-01-14 Update

BS ISO 13083:2015 history

• 2015 BS ISO 13083:2015 Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes