This standard specifies the technical requirements, test methods, inspection rules and marking, packaging, transportation, storage and quality certificate and order form (or contract) content of gold-beryllium alloy evaporation materials. This standard applies to gold-beryllium alloy evaporation materials used in the semiconductor industry.
YS/T 1069-2015 history
2015YS/T 1069-2015 Gold-beryllium alloy evaporation material