YS/T 1025-2015
High-purity tungsten and tungsten alloy sputtering target used in electronic film (English Version)

Standard No.

YS/T 1025-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Non-ferrous Metal

Latest

YS/T 1025-2015

Scope

This standard specifies the requirements, test methods, inspection rules and markings, packaging, transportation, storage, order orders (or contracts), etc. for high-purity tungsten and tungsten alloy sputtering targets for electronic thin films. This standard applies to high-purity tungsten and tungsten alloy sputtering targets for electronic thin films, hereinafter referred to as high-purity tungsten and tungsten alloy targets.

YS/T 1025-2015 history

• 2015 YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film