This standard specifies the terminology, properties, technical requirements, test methods, inspection rules and packaging, marking, storage, transportation, etc. of aluminum etching liquid for integrated circuits (hereinafter referred to as aluminum etching liquid). This standard applies to aluminum etching liquids for integrated circuits. This standard does not address safety issues. The user of this standard is responsible for establishing appropriate safety and health provisions and limitations of use.
SJ/T 11506-2015 history
2015SJ/T 11506-2015 Aluminum etching solution for Integrated Circuit