SJ/T 11504-2015
Test method for measuring surface quality of polished monocrystalline silicon carbide (English Version)

Standard No.

SJ/T 11504-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Electron

Latest

SJ/T 11504-2015

Scope

This standard specifies the visual inspection method for the surface quality of silicon carbide single crystal polished wafers (hereinafter referred to as "polished wafers"). This standard is applicable to the detection of surface quality of single-sided or double-sided polished silicon carbide single crystal polished wafers.

SJ/T 11504-2015 history

• 2015 SJ/T 11504-2015 Test method for measuring surface quality of polished monocrystalline silicon carbide