SJ/T 11498-2015
Test method for measuring oxygen contamination in heavily doped silicon substrates by secondary ion mass spectrometry (English Version)
- Standard No.
- SJ/T 11498-2015
- Language
- Chinese, Available in English version
- Release Date
- 2015
- Published By
- Professional Standard - Electron
- Latest
- SJ/T 11498-2015
SJ/T 11498-2015 history
- 2015 SJ/T 11498-2015 Test method for measuring oxygen contamination in heavily doped silicon substrates by secondary ion mass spectrometry
