SJ/T 11493-2015
Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry (English Version)

Standard No.

SJ/T 11493-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Electron

Latest

SJ/T 11493-2015

Scope

This standard specifies the test method for the total nitrogen concentration in single crystal materials on silicon substrates using secondary ion mass spectrometry (SIMS). This standard applies to the doping concentrations of antimony, arsenic and phosphorus

SJ/T 11493-2015 history

• 2015 SJ/T 11493-2015 Test method for measuring nitrogen concentration in silicon substrates by secondary ion mass spectrometry