SJ/T 11487-2015
Non-contact measurement method for the resistivity of semi-insulating semiconductor wafer (English Version)

Standard No.

SJ/T 11487-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

Professional Standard - Electron

Latest

SJ/T 11487-2015

Scope

This standard specifies a contactless measurement method for the resistivity of semi-insulating semiconductor wafers. This standard is applicable to the measurement of resistivity of high-resistance semiconductor materials such as semi-insulating gallium arsenide, indium phosphide, and silicon carbide. The measurement range of resistivity is 10 Ω·cm~10 Ω·cm.

SJ/T 11487-2015 history

• 2015 SJ/T 11487-2015 Non-contact measurement method for the resistivity of semi-insulating semiconductor wafer