GB/T 31351-2014
Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers (English Version)

Standard No.

GB/T 31351-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 31351-2014

Scope

This standard specifies the non-destructive testing method for the micropipe density of 4H and 6H silicon carbide single crystal polished wafers. This standard is applicable to the measurement of the micropipe density with the radial size of micropipes in the range of one micron to tens of microns after single-side polishing or double-side polishing of 4H crystal and 6H crystal silicon carbide single crystal polished wafers.

GB/T 31351-2014 history

• 2014 GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers