KS D 0078-2008
Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy

Standard No.

KS D 0078-2008

Release Date

2008

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS D 0078-2008(2018)

Latest

KS D 0078-2023

Replace

KS D 0078-1998

Scope

This standard covers a method for the determination of silicon single and polycrystalline silicon impurity concentrations by photoluminescence spectroscopy.

KS D 0078-2008 history

• 2023 KS D 0078-2023 Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy
• 0000 KS D 0078-2008(2018)
• 2008 KS D 0078-2008 Test method for determination of impurity concentrations in silicon crystal by photoluminescence spectroscopy
• 0000 KS D 0078-1998