YS/T 987-2014
Test method for measuring carbon containing compound in chlorosilane.Determination of methyldichlorosilane (English Version)
- Standard No.
- YS/T 987-2014
- Language
- Chinese, Available in English version
- Release Date
- 2014
- Published By
- Professional Standard - Non-ferrous Metal
- Status
- 2022-04
- Replace By
- YS/T 987-2021
- Latest
- YS/T 987-2021
- Scope
- This standard specifies the method for the determination of carbon impurities in chlorosilanes, mainly including the determination of methyldichlorosilane in trichlorosilane and the determination of methyldichlorosilane in silicon tetrachloride. This standard is applicable to the determination of methyldichlorosilane in trichlorosilane and the determination of methyldichlorosilane in silicon tetrachloride. The detection range of methyldichlorosilane in trichlorosilane and silicon tetrachloride is 0.000 01%~1.00%.
YS/T 987-2014 Referenced Document
- GB/T 4844.3 High pruity helum
YS/T 987-2014 history
- 2021 YS/T 987-2021 Determination of carbon content in chlorosilanes by gas chromatography mass spectrometry
- 2014 YS/T 987-2014 Test method for measuring carbon containing compound in chlorosilane.Determination of methyldichlorosilane
