This standard specifies methods for the determination of tail gas components from polycrystalline silicon reduction furnaces and hydrogenation furnaces. This standard is applicable to the determination of tail gas components (hydrogen, hydrogen chloride, trichlorosilane, dichlorodihydrogen silicon and silicon tetrachloride) of modified Siemens process reduction furnaces and hydrogenation furnaces. The detection range is volume fraction 0.1%~100%.
YS/T 983-2014 Referenced Document
GB/T 7445 Pure hydrogen, high pruity hydrogen and ultra pure hydrogen
GB/T 8979 Pure nitrogen and high purity nitrogen and ultra pure nitrogen
YS/T 983-2014 history
2014YS/T 983-2014 Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas