GB/T 30868-2014
Test method for measuring micropipe density of monocrystalline silicon carbide wafers.Chemically etching (English Version)

Standard No.

GB/T 30868-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 30868-2014

Scope

This standard specifies the method for measuring the micropipe density of silicon carbide single crystal by corrosion method of molten potassium hydroxide. This standard applies to the determination of silicon carbide single crystal micropipe density.

GB/T 30868-2014 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions

GB/T 30868-2014 history

• 2014 GB/T 30868-2014 Test method for measuring micropipe density of monocrystalline silicon carbide wafers.Chemically etching