GB/T 30866-2014
Test method for measuring diameter of monocrystalline silicon carbide wafers (English Version)

Standard No.

GB/T 30866-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 30866-2014

Scope

This standard specifies the method for measuring the diameter of a silicon carbide single wafer with a micrometer. This standard applies to the measurement of the diameter of a silicon carbide single wafer.

GB/T 30866-2014 history

• 2014 GB/T 30866-2014 Test method for measuring diameter of monocrystalline silicon carbide wafers