NF C96-050-11*NF EN 62047-11:2014 Semiconductor devices - Micro-electromechanical devices - Part 11 : test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
This part of IEC 62047 defines the test method for measuring the coefficients of linear thermal expansion (CLTE) of thin self-contained solid micro-electromechanical systems (MEMS) materials (metallic, ceramic, polymer, etc.) whose length is between 0.1mm and 1mm, the width between 10 pico m and 1 mm, and the thickness between 0.1 pico m and 1 mm, which are the main structural materials used for MEMS, micromachines and others. This test method can be applied to the measurement of CLTE in the temperature range from room temperature up to 30% of the melting temperature of the material.
NF C96-050-11*NF EN 62047-11:2014 history
2014NF C96-050-11*NF EN 62047-11:2014 Semiconductor devices - Micro-electromechanical devices - Part 11 : test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems