KS D ISO 22489:2012 Microbeam analysis-Electron probe microanalysis-Quantitative point analysis for bulk specimens using wavelength-dispersive x-ray spectroscopy
This standard covers wavelength-dispersive spectrometry (W) coupled to an electron probe microanalyzer or scanning electron microscope (SEM).
KS D ISO 22489:2012 history
2023KS D ISO 22489-2023 Microbeam analysis — Electron probe microanalysis — Quantitative point analysis for bulk specimens using wavelength dispersive x-ray spectroscopy
2018KS D ISO 22489:2018 Microbeam analysis — Electron probe microanalysis — Quantitative point analysis for bulk specimens using wavelength dispersive x-ray spectroscopy
2012KS D ISO 22489:2012 Microbeam analysis-Electron probe microanalysis-Quantitative point analysis for bulk specimens using wavelength-dispersive x-ray spectroscopy