KS I ISO 14644-5:2005
Cleanrooms and associated controlled environments－Part 5：Operations

Standard No.

KS I ISO 14644-5:2005

Release Date

2005

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS I ISO 14644-5:2020

Latest

KS I ISO 14644-5:2020

Replace

MISO14644-5

Scope

This standard describes the basic requirements for cleanroom operation. This includes the use of clean rooms and

KS I ISO 14644-5:2005 history

• 2020 KS I ISO 14644-5:2020 Cleanrooms and associated controlled environments —Part 5: Operations
• 2005 KS I ISO 14644-5:2005 Cleanrooms and associated controlled environments－Part 5：Operations