2023KS D ISO 15632-2023 Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS) for use with a scanning electron microscope(SEM) or a
2018KS D ISO 15632:2018 Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis
2012KS D ISO 15632:2012 Microbeam analysis-Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors