KS B ISO 5302:2004
Vacuum technology－Turbomolecular pumps－Measurement of performance characteristics

Standard No.

KS B ISO 5302:2004

Release Date

2004

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced 2019-01

Replace By

KS B ISO 5302-2019

Latest

KS B ISO 5302-2019

Scope

This standard specifies methods for measuring the performance characteristics of turbomolecular pumps. all types and

KS B ISO 5302:2004 history

• 2019 KS B ISO 5302-2019 Vacuum technology－Turbomolecular pumps－Measurement of performance characteristics
• 2004 KS B ISO 5302:2004 Vacuum technology－Turbomolecular pumps－Measurement of performance characteristics