BS EN 62047-11:2013
Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Standard No.

BS EN 62047-11:2013

Release Date

2013

Published By

British Standards Institution (BSI)

Latest

BS EN 62047-11:2013

BS EN 62047-11:2013 history

• 2013 BS EN 62047-11:2013 Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems