GB/T 29732-2013 Surface chemical analysis.Medium resolution Auger electron spectrometers.Calibration of energy scales for elemental analysis (English Version)
This standard specifies the calibration method for the Auger electron spectrometer when the kinetic energy scale uncertainty is 3 eV, and is used to identify conventional elements on the surface. In addition, a method for determining the calibration cycle is also specified. This standard applies to instruments with direct mode or differential mode resolution less than or equal to 0.5%, and the peak-to-peak modulation amplitude of the differential mode is 2 eV. This standard applies to spectrometers equipped with an inert gas ion gun or other sample cleaning methods with an electron gun of 4 keV or higher beam energy.