IEC 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
- Standard No.
- IEC 62047-11:2013
- Release Date
- 2013
- Published By
- International Electrotechnical Commission (IEC)
- Latest
- IEC 62047-11:2013
- Replace
- IEC 47F/154/FDIS:2013
- Scope
- This part of IEC 62047 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic@ ceramic@ polymeric etc.) microelectro- mechanical system (MEMS) materials with length between 0@1 mm and 1 mm and width between 10 ?? and 1 mm and thickness between 0@1 ?? and 1 mm@ which are main structural materials used for MEMS@ micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
IEC 62047-11:2013 history
- 2013 IEC 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
