DS/EN ISO 14644-9:2012
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration

Standard No.

DS/EN ISO 14644-9:2012

Release Date

2012

Published By

Danish Standards Foundation

Latest

DS/EN ISO 14644-9:2012

Scope

ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information ab

DS/EN ISO 14644-9:2012 history

• 2012 DS/EN ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration